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Formát
| Elektronický zdroj |
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Název
|  Journal of vacuum science and technology. B, Nanotechnology & microelectronics [elektronický zdroj] . materials, processing, measurement, & phenomena : JVST B. |
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Nakl. údaje
| New York, NY : AVS through the American Institute of Physics |
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Typ obsahu
| text |
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Typ nosiče
| online resource |
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Ext.odkaz
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 SFX Knihovny.cz
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ISSN
| 2166-2754 |
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Varianta názvu
| JVST B |
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| Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena |
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| Journal of vacuum science and technology. B, International journal devoted to microelectronics and nanometer structures : processing, measurement, & phenomena |
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| Nanotechnology & microelectronics |
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| Nanotechnology and microelectronics |
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Vydáváno
| Vychází od 2nd ser., v. 28, no. 2 (Mar./Apr. 2010). |
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Souč. periodicita
| 6x ročně |
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Dříve jako
| Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online), ISSN 1520-8567 |
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Související díla
| International Vacuum Nanoelectronics Conference.. International Vacuum Nanoelectronics Conference. |
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| North American Conference on Molecular-Beam Epitaxy.. Papers from the ... North American Conference on Molecular Beam Epitaxy. |
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| JVST. A & B. ISSN 1071-8028 |
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Další korporace
| American Institute of Physics. |
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| American Vacuum Society. |
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Poznámka
| Plný text je přístupný pouze z počítačů MSVK v Ostravě |
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| Access is allowed within library network only |
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Poznámka
| Includes: Papers from the ... International Vacuum Nanoelectronics Conference, 2010- ; papers from the ... North American Conference on Molecular-Beam Epitaxy, 2010- |
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Forma, žánr
| * Periodicals. * Periodicals. |
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Skupina Konspektu
| 621.3 - Elektrotechnika |
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Systém. číslo
| 000627036 |
